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Takuya Nomura
Takuya Nomura
Kyushu University
Plasma
Inorganic chemistry
Carbon film
Materials science
Deposition (law)
5
Papers
8
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Plasma parameter measurements of Ar+H2+C7H8 plasmas in H-assisted plasma CVD reactor
2010
Bulletin of the American Physical Society
Takuya Nomura
Tatsuya Urakawa
Yuki Korenaga
Daisuke Yamashita
Hidefumi Matsuzaki
Kazunori Koga
Masaharu Shiratani
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
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Deposition Profile Control of Carbon Films on the Surface of Fine Structures using Plasma CVD
2010
Kzunori Koga
Takuya Nomura
Masaharu Shiratani
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
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Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches
2010
TENCON | IEEE Region 10 Conference
Takuya Nomura
Tatsuya Urakawa
Yuki Korenaga
Daisuke Yamashita
Hidefumi Matsuzaki
Kazunori Koga
Masaharu Shiratani
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
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Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method
2009
MRS Proceedings
Takuya Nomura
Kazunori Koga
Masaharu Shiratani
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
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Control of deposition profile of plasma CVD hard carbon films on substrates with trenches
2008
Bulletin of the American Physical Society
Masaharu Shiratani
Jun Umetsu
Kazuhiko Inoue
Takuya Nomura
Hidefumi Matsuzaki
Kazunori Koga
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
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