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Plasma parameter measurements of Ar+H2+C7H8 plasmas in H-assisted plasma CVD reactor
Plasma parameter measurements of Ar+H2+C7H8 plasmas in H-assisted plasma CVD reactor
2010
Takuya Nomura
Tatsuya Urakawa
Yuki Korenaga
Daisuke Yamashita
Hidefumi Matsuzaki
Kazunori Koga
Masaharu Shiratani
Yuichi Setsuhara
Makoto Sekine
Masaru Hori
Keywords:
Plasma parameter
Plasma
Analytical chemistry
Chemistry
Materials science
Correction
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