Old Web
English
Sign In
Acemap
>
authorDetail
>
Mikio Ishijima
Mikio Ishijima
Materials science
Electronic engineering
Wafer
Optoelectronics
Lithography
3
Papers
4
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Sulfate-free photomask cleaning technology
2006
Shingo Anzai
Noriaki Takagi
Tomoaki Kamiyama
Naotoshi Kawaguchi
Mikio Ishijima
Toshimitsu watanabe
Hiroaki Morimoto
Tsuneaki Kuwajima
Makito Nakatsu
Shinichi Hasegawa
Show All
Source
Cite
Save
Citations (3)
New repair of clear defects on half-tone PSM using Ga implantation
2003
Yoshikazu Nagamura
Itaru Kanai
Koji Tange
Kunihiro Hosono
Koki Hayashi
Hidehiro Ikeda
Susumu Nagashige
Mikio Ishijima
Hironobu Iwasaki
Yasutaka Kikuchi
Show All
Source
Cite
Save
Citations (0)
Defect printability and inspection capability for tri-tone PSM
2003
Yoshikazu Nagamura
Kazuyuki Maetoko
Kiyoshi Maeshima
Naohisa Tamada
Kunihiro Hosono
Masaya Fujimoto
Yutaka Kodera
Koji Goto
Tsuyoshi Narita
Fuyuhiko Matsuo
Shinji Akima
Mikio Ishijima
Hironobu Iwasaki
Yasutaka Kikuchi
Show All
Source
Cite
Save
Citations (1)
1