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Kazuyuki Maetoko
Kazuyuki Maetoko
Mitsubishi Electric
Materials science
Resist
Fabrication
Dry etching
Lithography
5
Papers
2
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0
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2024
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Development of a MoSi-based bilayer HT-PSM blank for ArF lithography
2001
Shuichiro Kanai
Susumu Kawada
Akihiko Isao
Takaei Sasaki
Kazuyuki Maetoko
Nobuyuki Yoshioka
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Fabrication of MoSiON halftone masks using ZEP7000 for MEBES 4500
1999
Kazuyuki Maetoko
Koji Tange
Hitoshi Fukuma
Nobuyuki Yoshioka
Susumu Kawada
Masahiko Ishizuka
Takaei Sasaki
Charles A. Sauer
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ZEP resist process for high-accuracy photomask with a dry-etching capability
1995
Hideki Tarumoto
Kazuyuki Maetoko
Sakae Yamashita
Satoshi Aoyama
Hiroaki Morimoto
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