PREPARATION OF YBaCuO THIN FILMS BY MULTILAYER DEPOSITION

We report the fabrication of YBa2Cu3O7−x thin films by a combination of dc triode sputtering from Y and Cu targets, and simultaneous thermal evaporation from a BaF2 source. A composition near the ideal 1:2:3 stoichiometry, with a resistive transition onset at 92 K and zero resistance at 80 K have been obtained by deposition on SrTiO3 substrates, followed by furnace annealing.