Multifunctional X-ray Lithography Station at VEPP-3

Abstract The multifunctional X-ray lithography “LIGA” station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center “Siberian Synchrotron and Terahertz Radiation Center” (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented.