LIGA process - micromachining technique using synchrotron radiation lithography - and some industrial applications

We developed the LIGA (Lithographie or lithography/Galvanoformung or electroforming/Abformung or molding) process using a compact synchrotron radiation (SR) source. To make a compact SR source applicable for the LIGA process, we developed a highly sensitive resist and highly transparent mask for deep SR lithography. We commercialized two devices, a piezoelectric composite and a microprobe for IC testing. A microconnector and optical switch were also developed.