Структурные и плазмонные свойства слоев ПММА с ионно-синтезированными наночастицами серебра для оптоэлектроники

The paper proposed a formation method of the optical diffractive elements on the surface of the polymer (polymethylmethacrylate – PMMA) by mask low-energy high-dose implantation with silver ions. Ion implantation was carried out with an energy of 30 keV and doses from 5,0×1014–1,5×1017 ion/cm2 through the surface metal wire mask with square mesh of 20 mm. As evident from the optical plasmon absorption and atom-force microscopy (AFM) observations, during ion implantations in unprotected mask areas of the PMMA silver nanoparticles were synthesized. Fabrication of periodic surface microstructures as result of local surface sputtering by implanted silver ions of PMMA was detected by optical microscope and AFM. The effective functioning of a diffractive grid optical element on the microstructures of PMMA with silver nanoparticles was shown by laser radiation in the visible range. The presented results clearly demonstrate how the low-energy accelerated ions can be used for the fabrication of photonic periodic microstructures on dielectric surfaces in a single-step process.