Old Web
English
Sign In
Acemap
>
Paper
>
Fabrication and characterization of p-type silicon field-emitter arrays for lithography
Fabrication and characterization of p-type silicon field-emitter arrays for lithography
2005
T. F. Teepen
A H Veen van
H. vant Spijker
Stijn Willem Herman Steenbrink
A. van Zuuk
C.Th.H. Heerkens
Martha J. Wieland
Druten van N. J
P. Kruit
Keywords:
Cognitive psychology
Nanosphere lithography
X-ray lithography
Photolithography
Psychology
Stencil lithography
Multilayer soft lithography
Resist
Computational lithography
Next-generation lithography
Electronic engineering
Correction
Cite
Save
Machine Reading By IdeaReader
19
References
0
Citations
NaN
KQI
[]