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Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer. Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.

[ "X-ray lithography", "Soft lithography", "Next-generation lithography" ]
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