Scaling the Sensitivity of Integrated Plasmo-Photonic Interferometric Sensors

We present a new optical biosensing integration approach with multifunctional capabilities using plasmonic and photonic components on the same chip and a new methodology to design interferometric biosensors exhibiting record high sensitivity and enhanced resolution relying on a planar surface plasmon polariton (SPP) waveguide. First, we use this approach to demonstrate a proof of concept integrated plasmo-photonic liquid refractive index sensor based on a silicon nitride (Si3N4) Mach–Zehnder Interferometer (MZI). A 70 μm long, gold metal stripe is incorporated in the sensing arm serving as the transducer element. A variable optical attenuator and a thermo-optic phase shifter are deployed in the Si3N4 reference arm for performance optimization. The variable optical attenuator stage targets high extinction ratio of the resonance at the interferometer output by balancing the power between the two arms whereas the phase shifter is used to tune the MZI at the desired spectral window. Experimental results match...