Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN

Abstract He-induced nanostructured tungsten (so-called W-fuzz) was bombarded with Ar ions under 60° and the dynamic erosion behaviour was experimentally investigated. By using a highly sensitive quartz-crystal-microbalance technique in a particle catcher configuration, the sputtered particles distribution of W-fuzz could be evaluated. In contrast to a flat sample, where sputtered particles are emitted primarily in forward direction, we find that W-fuzz samples emit sputtered particles preferably in backward direction (i.e. in the direction of the incident ion beam). After continuous Ar irradiation of a W-fuzz sample the distribution approaches that of a flat sample. In addition to experimental data we also show modelling results obtained with a state-of-the-art Monte-Carlo (MC) binary collision approximation (BCA) code TRI3DYN in full 3D. Surface morphology changes as monitored by SEM as well as the dynamic sputtering behaviour can be well reproduced by the full 3D MC-BCA code.