Micro-fabricated millimeter wave vacuum electronic devices

Ohjoon Kwon,Jin-Kyu So,A. Srivastava,Matlabjon Sattorov,Ranjan Kumar Barik,Anirban Bera,A. K. Tanwar,Seunghyuk Park,In-Keun Baik,Jun-Ho Choi,Junyeon Kim,Jong-Won Yang,Jong Hyun Kim,Suk-Sang Chang,Gun-Sik Park

Micro-fabricated millimeter wave vacuum electronic devices

2010

Ohjoon Kwon
Jin-Kyu So
A. Srivastava
Matlabjon Sattorov
Ranjan Kumar Barik
Anirban Bera
A. K. Tanwar
Seunghyuk Park
In-Keun Baik
Jun-Ho Choi
Junyeon Kim
Jong-Won Yang
Jong Hyun Kim
Suk-Sang Chang
Gun-Sik Park

0.1 THz Coupled Cavity Backward-wave Oscillator (CCBWO) is being developed utilizing two-step X-ray lithography. The characteristics of this 0.1 THz CCBWO are investigated through cold and hot tests.

Keywords:

LIGA
X-ray lithography
Optoelectronics
Backward-wave oscillator
Optics
Terahertz radiation
Microfabrication
Electronics
Physics
Vacuum tube
Klystron
Lithography
Extremely high frequency

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