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Fabrication of PTFE-filled waveguide bandpass filter using SR direct etching
Fabrication of PTFE-filled waveguide bandpass filter using SR direct etching
2010
Kishihara
Kato
Ikeuchi
Murai
Ukita
Utsumi
Kawai
Ohta
Keywords:
X-ray lithography
Waveguide filter
Q band
Band-pass filter
Fabrication
Etching (microfabrication)
Materials science
Waveguide (electromagnetism)
Optoelectronics
Passband
Correction
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