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Electrical Characterization of Different Failure Modes in Sub-100 nm Devices Using Nanoprobing Technique
Electrical Characterization of Different Failure Modes in Sub-100 nm Devices Using Nanoprobing Technique
2009
E. Hendarto
S.L. Toh
J. Sudijono
P.K. Tan
H. Tan
Y.W. Goh
L. Zhu
Q. Deng
H.B. Lin
R. He
H.L. Li
Z.H. Mai
J. Lam
Keywords:
Nanoprobing
Optoelectronics
Materials science
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