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Thin channel β-Ga 2 O 3 MOSFETs with self-aligned refractory metal gates
Thin channel β-Ga 2 O 3 MOSFETs with self-aligned refractory metal gates
2019
Kyle J. Liddy
Andrew J. Green
Nolan S. Hendricks
Eric R. Heller
N. Moser
Kevin D. Leedy
Andreas Popp
Miles Lindquist
Stephen E. Tetlak
Günter Wagner
Kelson D. Chabak
Gregg H. Jessen
Keywords:
Analytical chemistry
Refractory metals
Optoelectronics
Chemistry
Communication channel
Optics
Correction
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