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XPS and XPD studies on the system hafnium(oxide) on Si(100) using soft X-rays
XPS and XPD studies on the system hafnium(oxide) on Si(100) using soft X-rays
2006
D. Weier
C. Fluechter
U. Berges
C. Westphal
S. Dreiner
M. Schuermann
E. Henschel
M.F. Carazzolne
A. Pancotti
Richard Landers
George G. Kleiman
Keywords:
X-ray crystallography
Materials science
X-ray photoelectron spectroscopy
Silicon
Hafnium
Refractory metals
Transition metal
Thin film
Semimetal
Analytical chemistry
Correction
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