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Effect of Postdeposition Sulfurization Annealing on Sputtering Deposited MoS 2 film using Organic Sulfur Compound
Effect of Postdeposition Sulfurization Annealing on Sputtering Deposited MoS 2 film using Organic Sulfur Compound
2016
Seiya Ishihara
Yusuke Hibino
Naomi Sawamoto
Takumi Ohashi
Kentarou Matsuura
Hideaki Machida
Masato Ishikawa
Hiroshi Sudoh
Hitoshi Wakabayashi
Atsushi Ogura
Keywords:
Molybdenum disulfide
Annealing (metallurgy)
Sputtering
Sulfur
Inorganic chemistry
Materials science
Correction
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