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Next generation fine pitch Cu Pillar technology Enabling next generation silicon nodes
Next generation fine pitch Cu Pillar technology Enabling next generation silicon nodes
2011
Mark E. Gerber
Craig Beddingfield
Sean J. OConnor
Min Yoo
Minjae Lee
DaeByoung Kang
Sung-Su Park
Curtis Zwenger
Robert Darveaux
Robert Lanzone
Keywords:
Nanotechnology
Pillar
Materials science
Silicon
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