High Excitation Efficiency of Channel Plasmon Polaritons in Tailored, UV-Lithography-Defined V-Grooves

Cameron L. C. Smith,Anil Haraksingh Thilsted,Cesar E. Garcia-Ortiz,Ilya P. Radko,Rodolphe Marie,Claus Jeppesen,Christoph Vannahme,Sergei I. Bozhevolnyi,Anders Kristensen

High Excitation Efficiency of Channel Plasmon Polaritons in Tailored, UV-Lithography-Defined V-Grooves

2014

Cameron L. C. Smith
Anil Haraksingh Thilsted
Cesar E. Garcia-Ortiz
Ilya P. Radko
Rodolphe Marie
Claus Jeppesen
Christoph Vannahme
Sergei I. Bozhevolnyi
Anders Kristensen

We demonstrate g50% conversion of light to V-groove channel plasmon-polaritons (CPPs) via compact waveguide-termination mirrors. Devices are fabricated using UV-lithography and crystallographic silicon etching. The V-shape is tailored by thermal oxidation to support confined CPPs.

Keywords:

Surface plasmon
Plasmon
Optoelectronics
Optics
Photolithography
Thermal oxidation
Nanophotonics
Polariton
Physics
Silicon
Communication channel
Surface plasmon polariton
Lithography
Electron-beam lithography

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