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Back End of Line (BEOL) Pulse Nanoprobing Fault Isolation Technique on RF Device with Soft Failure Issue
Back End of Line (BEOL) Pulse Nanoprobing Fault Isolation Technique on RF Device with Soft Failure Issue
2020
P.K. Tan
C. Q. Chen
R. Fransiscus
A. Quah
P. T. Ng
S. M. Parab
Y.Z. Ma
R. He
Keywords:
Back end of line
Electrical engineering
Fault detection and isolation
Computer science
Pulse (signal processing)
Nanoprobing
Correction
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