Birefringence characterization of TiO2 thin films deposited by DC sputtering over tilted substrates
2004
In this paper, birefringence characterization of thin films of TiO 2 , deposited by DC sputtering over tilted substrates, is presented. Birefringence, defined as the difference of refractive index for polarizations s and p, resulted 0.03 for the best case of deposition angle. In addiction, this birefringent films were used to manufacture polarizing narrow-band Fabry-Perot-type filters centered at 400 and 700 nm.
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