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Fabrication of short-channel organic electronic devices using electron beam lithography
Fabrication of short-channel organic electronic devices using electron beam lithography
2004
Kasper Edwards
J. J. Heremans
Jun H. Jo
Victoria Soghomonian
Keywords:
X-ray lithography
Electron-beam lithography
Stencil lithography
Maskless lithography
Next-generation lithography
Photolithography
Multilayer soft lithography
Electronic engineering
Resist
Materials science
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