Influence of the deposition-induced stress on the magnetic properties of magnetostrictive amorphous (Fe80Co20)80B20 multilayers with orthogonal anisotropy

In this work, we experimentally justify that the control of the mechanical stress induced during the deposition of sputtered amorphous magnetostrictive (Fe80Co20)80B20 allows a custom design of its magnetic properties. FeCoB multilayers have been sputtered on thermal oxide Si substrates with different buffer materials. The crystalline quality and the thermomechanical properties of the buffer layer influence both the coercive and the anisotropy field. Those buffer layers with both high rigidity and poor thermal conductivity do not allow the dissipation of energy of the incoming sputtered material. Therefore, the mechanical stresses related to the deposition process cannot be released, leading to magnetic layers with high easy-axis coercive field and low anisotropy field. This shows that the mechanical stresses accumulated during deposition are a key parameter for the control of coercivity.