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Low resistance Mo-W alloy gate line for TFT-LCDs
Low resistance Mo-W alloy gate line for TFT-LCDs
1996
Toshiyuki Oka
Masaki Atsuta
Yujiro Hara
Yoshiko Tsuji
Mitsushi Minato-ku Ikeda
Y. Ogawa
Momoko Takemura
K. Suzuki
Y. Kataoka
Y Shigemitsu
Hideyasu Tsuji
T. Dohi
K. Mori
Keywords:
Thin-film transistor
Alloy
Materials science
Electronic engineering
Metallurgy
low resistance
Sputtering
Engineering physics
high definition
Correction
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