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The Effect of Material and Process Interactions on BEOL Integration
The Effect of Material and Process Interactions on BEOL Integration
2009
Terry A. Spooner
John C. Arnold
D. Canaperi
James Chen
Shyng-Tsong Chen
Stephen M. Gates
Atsunobu Isobayashi
Pak Leung
Satyavolu S. Papa Rao
Muthumanickam Sankarapandian
Hosadurga Shobha
O. van der Straten
Keywords:
Materials science
Engineering physics
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