SOFTERRORRATEREDUCTION INDYNAMICMEMORYWITHTRENCHCAPACITOR CELL

H. Ishiuchi,Toshiaki Watanabe,T. Tanaka,K. Kishi,M. Ishikawa,N. Goto,K. Kohyama,H. Nioji,Ozawa Semiconductor

SOFTERRORRATEREDUCTION INDYNAMICMEMORYWITHTRENCHCAPACITOR CELL

1986

H. Ishiuchi
Toshiaki Watanabe
T. Tanaka
K. Kishi
M. Ishikawa
N. Goto
K. Kohyama
H. Nioji
Ozawa Semiconductor

Alpha-particle-induced softerrorrateof dynamic memorywithtrenchcapacitorcellhasbeenstudied experimental ly. Boththebitlinemodeandthecell modeofthesofterrorratecanbeeffectively reduced utilizing a p-wellstructure onp-typesubstrate. The reduction ratioisabout1/200orless.

Keywords:

Cell
Molecular biology
Materials science
Chemistry
Biophysics

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