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PMOSFET Vth Modulation Technique using Fluorine Treatment through ALD-TiN Suitable for CMOS Devices
PMOSFET Vth Modulation Technique using Fluorine Treatment through ALD-TiN Suitable for CMOS Devices
2007
Kaori Tai
S. Yamaguchi
Kazuki Tanaka
Tomoyuki Hirano
Itaru Oshiyama
S. Kazi
Takashi Ando
Masashi Nakata
M. Yamanaka
Ryo Yamamoto
S. Kanda
Y. Tateshita
Hitoshi Wakabayashi
Y. Tagawa
Masanori Tsukamoto
Hayato Iwamoto
M. Saito
N. Nagashima
Shingo Kadomura
Keywords:
Fluorine
Electronic engineering
Tin
CMOS
Materials science
Modulation
Optoelectronics
Correction
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