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Dhurv Fomra
Dhurv Fomra
Titanium nitride
Plasma
Materials science
Inorganic chemistry
Chemical engineering
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Characterization of plasma enhanced atomic layer deposited titanium nitride (Conference Presentation)
2018
Ray Secondo
Dhurv Fomra
N. Izyumskaya
Vitally Avrutin
Ü. Özgür
Nathaniel Kinsey
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