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Characterization of plasma enhanced atomic layer deposited titanium nitride (Conference Presentation)
Characterization of plasma enhanced atomic layer deposited titanium nitride (Conference Presentation)
2018
Ray Secondo
Dhurv Fomra
N. Izyumskaya
Vitally Avrutin
Ü. Özgür
Nathaniel Kinsey
Keywords:
Titanium nitride
Plasma
Materials science
Inorganic chemistry
Chemical engineering
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