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Jieun Lee
Jieun Lee
SK Hynix
Metrology
Computer science
Electronic engineering
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5
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5
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Improved accuracy and robustness for advanced DRAM with tunable multi-wavelength imaging and scatterometry overlay metrology
2019
Honggoo Lee
Sangjun Han
Minhyung Hong
Jieun Lee
Dongyoung Lee
Ahlin Choi
Chanha Park
Dohwa Lee
Seongjae Lee
Jungtae Lee
Jeongpyo Lee
Dongsub Choi
Sanghuck Jeon
Zephyr Liu
Hao Mei
Tal Marciano
Eitan Hajaj
Lilach Saltoun
Dana Klein
Eran Amit
Anna Golotsvan
Wayne Zhou
Eitan Herzel
Roie Volkovich
John C. Robinson
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In-cell overlay metrology by using optical metrology tool
2018
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Hyowon Park
Waley Liang
Dongsub Choi
Nakyoon Kim
Jeongpyo Lee
Stilian Ivanov Pandev
Sanghuck Jeon
John C. Robinson
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Accuracy optimization with wavelength tunability in overlay imaging technology
2018
Honggoo Lee
Yoonshik Kang
Sangjoon Han
Kyuchan Shim
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Young-Sik Kim
Tal Marciano
Dana Klein
Eitan Hajaj
Sharon Aharon
Guy Ben-Dov
Saltoun Lilach
Dan Serero
Anna Golotsvan
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Spectral tunability for accuracy, robustness, and resilience
2018
Einat Peled
Eran Amit
Yuval Lamhot
Alexander Svizher
Dana Klein
Anat Marchelli
Roie Volkovich
Tal Yaziv
Aaron Cheng
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Dongsub Choi
Dohwa Lee
Sanghuck Jeon
Jungtae Lee
Seongjae Lee
Zephyr Liu
Jeongpyo Lee
John C. Robinson
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Clean focus, dose and CD metrology for CD uniformity improvement
2018
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Nakyoon Kim
John C. Robinson
Markus Mengel
Rovira Pablo
Sungchul Yoo
Raphael Jean Michel Marie Getin
Dongsub Choi
Sanghuck Jeon
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