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Seongjae Lee
Seongjae Lee
KLA-Tencor
Metrology
Robustness (computer science)
Electronic engineering
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Computer science
2
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2
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0
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2024
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Improved accuracy and robustness for advanced DRAM with tunable multi-wavelength imaging and scatterometry overlay metrology
2019
Honggoo Lee
Sangjun Han
Minhyung Hong
Jieun Lee
Dongyoung Lee
Ahlin Choi
Chanha Park
Dohwa Lee
Seongjae Lee
Jungtae Lee
Jeongpyo Lee
Dongsub Choi
Sanghuck Jeon
Zephyr Liu
Hao Mei
Tal Marciano
Eitan Hajaj
Lilach Saltoun
Dana Klein
Eran Amit
Anna Golotsvan
Wayne Zhou
Eitan Herzel
Roie Volkovich
John C. Robinson
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Spectral tunability for accuracy, robustness, and resilience
2018
Einat Peled
Eran Amit
Yuval Lamhot
Alexander Svizher
Dana Klein
Anat Marchelli
Roie Volkovich
Tal Yaziv
Aaron Cheng
Honggoo Lee
Sangjun Han
Minhyung Hong
Seungyoung Kim
Jieun Lee
Dongyoung Lee
Eungryong Oh
Ahlin Choi
Dongsub Choi
Dohwa Lee
Sanghuck Jeon
Jungtae Lee
Seongjae Lee
Zephyr Liu
Jeongpyo Lee
John C. Robinson
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Citations (2)
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