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Dejan Jovanovic
Dejan Jovanovic
Freescale Semiconductor
Effective method
Leakage (electronics)
Lithography
Reflectivity
Photolithography
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Extending immersion lithography to the 32-nm node
2007
Proceedings of SPIE
Scott Warrick
Will Conley
Vincent Farys
Michael Benndorf
Jan-Willem Gemmink
Yorick Trouiller
Jerome Belledent
Dejan Jovanovic
P. Gouraud
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