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Donald Pelcher
Donald Pelcher
Rudolph Technologies, Inc.
Ellipsometry
Reflectometry
Reflectivity
Laser
Wafer
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Characterizing SiOx Ny ARC materials with laser ellipsometry and DUV reflectometry
2004
Gary Guangbin Jiang
Timothy Sun
Donald Pelcher
Jana Clerico
Jui-Ping Li
Yi-Ru Chen
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