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Haiyong Gao
Haiyong Gao
Virginia Commonwealth University
Metalorganic vapour phase epitaxy
Chemical vapor deposition
Dry etching
Gallium nitride
Inductively coupled plasma
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Deep inductively coupled plasma etching of ELO-GaN grown with high fill factor
2011
Proceedings of SPIE
Haiyong Gao
J. Lee
X. Ni
J. H. Leach
Ü. Özgür
Hadis Morkoç
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