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Sakae Yamashita
Sakae Yamashita
Mitsubishi Electric
Dry etching
Engineering drawing
Analytical chemistry
Photomask
Resist
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ZEP resist process for high-accuracy photomask with a dry-etching capability
1995
Hideki Tarumoto
Kazuyuki Maetoko
Sakae Yamashita
Satoshi Aoyama
Hiroaki Morimoto
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