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Frank Cm Wu
Frank Cm Wu
Mask inspection
Wafer
Wafer fabrication
Computer science
Computer hardware
2
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2024
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Lithography printability review: the ultimate step in reticle analyzer to avoid killer mask defects in wafer fab manufacturing
2021
Frank Cm Wu
Chin Kuei Chang
Chain Ping Chen
Dongmei Wu
Wei Chen
Jinhua Zeng
Suo Li
Le Wang
Vikram Tolani
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Automatic classification of patterned mask defects for requalification at wafer fabs in absence of layout data
2020
Samir Bhamidipati
Prakash Deep
Mark Pereira
Sankaranarayanan Paninjath
Peter Buck
Keitaro Katabuchi
Frank Cm Wu
Chin Kuei Chang
Chain Ping Chen
Takenori Kato
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