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Masatoshi Terayama
Masatoshi Terayama
Toshiba
Optoelectronics
Electronic engineering
Suction
Extreme ultraviolet
Extreme ultraviolet lithography
3
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New development system for EUV mask
2012
Masatoshi Terayama
Hideaki Sakurai
Mari Sakai
Masamitsu Itoh
Hideo Funakoshi
Hideaki Iwasaka
Junko Iizuka
Mitsuaki Maruyama
Naoya Hayashi
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Study of electric-field-induced-development method
2009
Masatoshi Terayama
Hideaki Sakurai
Mari Sakai
Masamitsu Ito
Osamu Ikenaga
Hideo Funakoshi
Takahiro Shiozawa
Syoutarou Miyazaki
Yoshihiko Saito
Naoya Hayashi
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Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication
2008
Hideaki Sakurai
Masatoshi Terayama
Mari Sakai
Masamitsu Itoh
Osamu Ikenaga
Hideo Funakoshi
Norifumi Sato
Kenji Nakamizo
Masato Nomura
Yoshihiko Saito
Junji Nakao
Naoya Hayashi
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