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Makato Shimizu
Makato Shimizu
Organic chemistry
Thin film
Resist
Extreme ultraviolet lithography
Molecular physics
1
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5
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LER Limitations of Resist Thin Films
2012
Journal of Photopolymer Science and Technology
Brian Cardineau
William Early
Tomohisa Fujisawa
Ken Maruyama
Makato Shimizu
Shalini Sharma
Karen Petrillo
Robert L. Brainard
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