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LER Limitations of Resist Thin Films
LER Limitations of Resist Thin Films
2012
Brian Cardineau
William Early
Tomohisa Fujisawa
Ken Maruyama
Makato Shimizu
Shalini Sharma
Karen Petrillo
Robert L. Brainard
Keywords:
Organic chemistry
Thin film
Resist
Extreme ultraviolet lithography
Molecular physics
Materials science
Photochemistry
Nanotechnology
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