Old Web
English
Sign In
Acemap
>
authorDetail
>
Furukawa Masakzu
Furukawa Masakzu
Chemical vapor deposition
Silicon nitride
Optoelectronics
Plasma
Surface wave
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Chemical Vapor Deposition of Silicon Nitride Films Enhanced by Surface-Wave Plasma and Electron Device Application
2014
Kawakami Kyohei
Ishimaru Takahiro
Shinohara Masatoshi
Okada Hiroshi
Furukawa Masakzu
Wakahara Akihiro
Sekiguchi Hiroto
Show All
Source
Cite
Save
Citations (0)
1