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Thormas N. Horsky
Thormas N. Horsky
Ion beam
Ion gun
Beam diameter
M squared
Optics
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High Current Ion Implanter "LUXiON"
2016
Yusuke Kuwata
Tetsuya Igo
Kohei Tanaka
Sami K. Hahto
Tetsuro Yamamoto
H. Une
Hirofumi Asai
Masayoshi Hino
Sei Umisedo
Karuppanan Sekar
Thormas N. Horsky
Yoshiki Nakashima
Nariaki Hamamoto
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