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Yankun Zhan
Yankun Zhan
Critical dimension
Metrology
Electronic engineering
Process control
Materials science
3
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Optical critical dimension measurement for source/drain structures at advanced node
2016
CSTIC | China Semiconductor Technology International Conference
Zhensheng Zhang
Yi Huang
Yi Shih Lin
Yankun Zhan
Dongmei Sun
Shiqiu Cheng
Feng Yang
Yaoming Shi
Yiping Xu
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Optical critical dimension measurement for 16/14 nm FinFET
2016
CSTIC | China Semiconductor Technology International Conference
Shiqiu Cheng
Yankun Zhan
Qingyun Zuo
Jia Chu
Ming Li
Chunhui Fan
Zhensheng Zhang
Yaoming Shi
Yiping Xu
Feng Yang
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Optical Critical Dimension Measurement for AEI Structures at Sub 65 Nm Node
2014
Yi Huang
Bo-Xiu Cai
Yi-Shih Lin
Yankun Zhan
Xin Wang
Jiang-Tao Dang
Hai-Tao Li
Hai-Jun Gao
Zhensheng Zhang
Yaoming Shi
Yiping Xu
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