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Jiang-Tao Dang
Jiang-Tao Dang
Critical dimension
Electrical engineering
Optoelectronics
Physics
Grating
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Optical Critical Dimension Measurement for AEI Structures at Sub 65 Nm Node
2014
Yi Huang
Bo-Xiu Cai
Yi-Shih Lin
Yankun Zhan
Xin Wang
Jiang-Tao Dang
Hai-Tao Li
Hai-Jun Gao
Zhensheng Zhang
Yaoming Shi
Yiping Xu
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OCD Measurement with the Illuminated Light Spot Size Being Larger than the Grating Region
2013
Zhensheng Zhang
Xin Wang
Jiang-Tao Dang
Hai-Tao Li
Yaoming Shi
Feng Yang
Yiping Xu
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