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K. Yamashita
K. Yamashita
Doshisha University
Ion beam
Sputtering
Thin film
Atomic physics
Materials science
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Application of low energy negative and positive ion beams to thin film formation
2008
Y. Horino
Nobuteru Tsubouchi
B. Enders
K Fujii
K. Yamashita
M. Wada
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