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Vineeth Sasidharan
Vineeth Sasidharan
University of New Mexico
Optics
Materials science
Roll-to-roll processing
Nanolithography
Numerical aperture
3
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2
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Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
2021
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Vineeth Sasidharan
Alexander Neumann
S. R. J. Brueck
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High-speed in-line optical angular scatterometer for high-throughput roll-to-roll nanofabrication
2021
Juan J. Faria-Briceno
Vineeth Sasidharan
Alexander Neumann
Shrawan Singhal
S. V. Sreenivasan
Steven R. J. Brueck
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Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication
2019
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Juan J. Faria-Briceno
Ruichao Zhu
Vineeth Sasidharan
Alexander Neumann
Shrawan Singhal
Sidlgata V. Sreenivasan
S. R. J. Brueck
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