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Ruichao Zhu

University of New Mexico

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Scatterometry for nanoimprint lithography

2016 Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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Metrology, Inspection, and Process Control for Microlithography XXIX

2015
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Metrology of 50nm HP wire-grid polarizer

2015
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Integration of Block-Copolymer with Nano-Imprint Lithography: Pushing the Boundaries of Emerging Nano-Patterning Technology.

2012
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