Old Web
English
Sign In
Acemap
>
authorDetail
>
Manfred Meisen
Manfred Meisen
Reflectometry
Metrology
Extreme ultraviolet
Electronic engineering
Extreme ultraviolet lithography
3
Papers
13
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Status of EUV-lamp development and demonstration of applications
2004
Rainer Lebert
Christian Wies
Bernhard Jaegle
Larissa Juschkin
Ulrich Bieberle
Manfred Meisen
Willi Neff
Klaus Bergmann
Konstantin Walter
Oliver Rosier
Max Christian Schuermann
Thomas Missalla
Show All
Source
Cite
Save
Citations (7)
High-throughput EUV reflectometer for EUV mask blanks
2004
Rainer Lebert
Christian Wies
Larissa Juschkin
Bernhard Jaegle
Manfred Meisen
Lutz Aschke
Frank Sobel
Holger Seitz
Frank Scholze
G. Ulm
Konstantin Walter
Willi Neff
Klaus Bergmann
W. Biel
Show All
Source
Cite
Save
Citations (6)
Vorrichtung zur testbestrahlung von mit photoempfindlichen lacken beschichteten objekten
2003
Wolf-Dieter Domke
Larissa Juschkin
Karl Kragler
Rainer Lebert
Manfred Meisen
Show All
Source
Cite
Save
Citations (0)
1