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Starflinger
Starflinger
Etching (microfabrication)
Dram
Sphere packing
random access memory
Optoelectronics
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A Self-aligned Isolation-oxide Process Before Gate Formation for Enhanced Packing Density of Megabit DRAMs
1989
ESSDERC | European Solid-State Device Research Conference
Kuepper
Hasler
Roehl
Bolze
Diekmann
Mohr
Starflinger
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