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Matias Kagias
Matias Kagias
Optoelectronics
Silicon
Lithography
Reactive-ion etching
Etching
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High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching.
2018
arXiv: Applied Physics
Konstantins Jefimovs
Lúcia Romano
Joan Vilà Comamala
Matias Kagias
Zhentian Wang
Li Wang
Christian Dais
Harun H. Solak
Marco Stampanoni
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